Optical equipment

  • Lasers with different wavelengths
  • Hyperspectral microscope
  • Two-photon stereolithograph
  • Various optical spectrometers
  • Several plug-and-play optical tweezers of our own design
  • Optical tables and optical accessories

Photolitography equipment

  • Fully equipped clean rooms
  • Photolitography and coatings facility
  • Direct Laser Writer – DLW (Durham Magneto Optics)
  • Deep Reactive Ion Etching – DRIE (Oxford Instruments)
  • Galvanic bath

Prototyping

  • 3D printers
  • Resin 3D printer (Anycubic)
  • CNC
  • Electronics lab

Special equipment of our Institute

  • Fully equipped workshops and chemical labs
  • Mask aligner (Suss MicroTec)
  • Electron lithograph – EBL (Victec)
  • Electron microscopes and Cryo-SEM (Thermo Fischer Scientific)
  • Atomic Force Microscopy – AFM (Bruker)
  • Plasma system (Diener)
  • Raman spectrometry system inVia Reflex with various lasers (Renishaw)
  • Evaporator
  • Magnetron sputtering system
  • Metrology systems
  • Optical surface interferometric profiler
  • Confocal laser scanning microscopy

Which devices we can offer?

Hyperspectral microscope


Clean rooms, DLW


Galvanic bath


Spin coater


Optical tweezers

Two-photon stereolithograph


Deep Reactive Ion Etching


Scanning probe microscope

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Mask Aligner


Spectrometer Czerny-Turner